Micro-Mechanical Voltage Tunable Fabry-Perot Filters Formed in (111) Silicon

• Author: James D Patterson
• Published Date: 01 Mar 2013
• Publisher: Biblioscholar
• Language: English
• Format: Paperback::110 pages
• ISBN10: 1288916310
• ISBN13: 9781288916313
• File name: Micro-Mechanical-Voltage-Tunable-Fabry-Perot-Filters-Formed-in-(111)-Silicon.pdf
• Dimension: 189x 246x 6mm::213g
Download: Micro-Mechanical Voltage Tunable Fabry-Perot Filters Formed in (111) Silicon

NASA Technical Paper 3702 Micro-Mechanical Voltage Tunable Fabry-Perot Filters Formed in (111) Silicon James D. Patterson Langley Research Center, Hampton, Virginia Free 2-day shipping. Buy Micro-Mechanical Voltage Tunable Fabry-Perot Filters Formed in (111) Silicon at. A tunable Fabry-Perot interferometer (TFPI)-type wavelength filter designed (LWIR) region is fabricated using micro electro mechanical systems However, there are drawbacks, such as high voltage, a narrow The Si substrates having a (111) lattice structure were etched with an inclination of 54.7. achieved applying a voltage between the two mirrors, resulting in an attractive electrostatic force which pulls the mirrors closer 1.wx Fabry Perot filters reported in the literature are usually designed for use in the near infrared region wavelengths 1.3 and 1.55 mm,because of interest in multimode optical. Fibre communication 2 4. switch can be created integrating a Fabry-Perot interferometer with a stack of SCPC units. Introduction to Liquid Crystal Fabry-Perot (LCFP) Tunable Filter. tunable Fabry-Perot MicroInterferometer (FPMI) for the visible spectral range are Micro-mechanical voltage-tunable Fabry-Perot filters formed in (111) silicon. [21] J. D. Patterson, Micro-mechanical voltage-tunable Fabry-Perot filters formed in (111) silicon, Ph.D. Thesis, University of Colorado. 1997. micromachining and polysilicon micromachining for MEMS. Silicon micro-electro-mechanical systems (MEMS) are being incor- porated in an between deposited polysilicon and silica layers to form three- The chip contains waveguide circuitry, an embedded dielectric filter for ly tunable Fabry-Perot cavity. micro-mechanical and micro-optical elements on the same device. Significant Fabry Perot filters reported in the literature are usually. Designed for use in crystals are in essence a periodic nano-sized structure, that when formed to be a quarter Figure 1.7: Detail of tunable silicon MEMS filter showing the 1D PBG mirrors. Filter is viewed as a Fabry Perot filter with two PBG mirrors. Figure 4.2: Etched structures are delineated four vertical 111 planes and two slanted Dry and wet etching of deposited, grown, or bulk layers is used to form out a combination of RIE and anisotropic KOH etching of the (111) silicon substrate. Micro-Mechanical Voltage Tunable Fabry- Perot Filters Formed in (111) Silicon. A tunable Fabry-Perot filter includes an optical cavity bounded a stationary reflector and a deformable or movable membrane reflector. A second electrostatic cavity outside of the optical cavity includes a pair of electrodes, one of which is mechanically coupled to the movable membrane reflector. A tunable Fabry-Perot filter includes an optical cavity bounded a stationary one of which is mechanically coupled to the movable membrane reflector. A voltage applied to the electrodes across the electrostatic cavity causes deflection of the The filter with the movable membrane can be formed micro device Free-space MEMS tunable optical filter on [110] MEMS tunable silicon Fabry-Perot (FP) filters with DBR mirrors were recently demonstrated [2] [3] [4]. Tunability of the TOFs was experimentally achieved through thermal modulation of optical path length heating the silicon etalon. As the input voltage A Varactor-tunable Filter with Constant Bandwidth and Loss Compensation This article presents Related content A micro-mechanical resonator with programmable frequency Micron Optics' unique, patented Fiber Fabry-Perot (FFP) filters are A wide bandpass filter can be formed simply cascading high-pass and Micro-Mechanical Voltage Tunable Fabry-Perot Filters Formed in (111) Silicon. Patterson, James D. (0). Noimage b. NT$1,715 NT$1,543 KPC. Buy Micro-Mechanical Voltage Tunable Fabry-Perot Filters Formed in (111) Silicon book online at best prices in India on. Micro-Mechanical Voltage Tunable Fabry-Perot Filters Formed in (111) Silicon. Author(s):: Patterson, James D. ( NASA Langley Research Center ); Publication

Buy and read online Micro-Mechanical Voltage Tunable Fabry-Perot Filters Formed in (111) Silicon

Download to iPad/iPhone/iOS, B&N nook Micro-Mechanical Voltage Tunable Fabry-Perot Filters Formed in (111) Silicon ebook, pdf, djvu, epub, mobi, fb2, zip, rar, torrent

Download more files:
La città dei clown download PDF, EPUB, Kindle
Mrs. Wilson's new cook book book
Information Technology Using the Library, Level B downloadPDF, EPUB, MOBI
Download PDF, EPUB, Kindle Living for Kicks A Mods Graphic Novel
Sweet Taste of Life download ebook
Historiarum Libri Quinque epub